| 仝杰,张薇,王兴隆,王诗月,贾雅娜,王文.新型表面波电流传感器优化设计*[J].,2017,36(5):389-394 |
| 新型表面波电流传感器优化设计* |
| The optimum design of new SAW-based current sensor |
| 投稿时间：2017-01-04 修订日期：2017-08-14 |
| 中文摘要: |
| 本文对结合磁致伸缩效应的新型声表面波电流传感器进行优化设计。传感器采用80 MHz声表面波（Surface acoustic wave： SAW）双通道延迟线型差分振荡器，并在传感通道SAW器件表面声传播路径上溅射磁致伸缩薄膜，利用薄膜材料在电流激发磁场作用产生的磁致伸缩效应引起声传播速度的变化，并以相应振荡器频率的变化来表征待测电流。通过对不同磁致伸缩材料（FeCo和FeNi）以及薄膜厚度的传感效应进行分析，用以为传感器的优化设计提供思路，并通过实验进行验证，实验结果显示，相对于FeCo而言，采用FeNi作为敏感材料的电流传感器具有良好的重现性、线性度以及较高的灵敏度。 |
| 英文摘要: |
| In this paper, a novel SAW current sensor based on the magnetostrictive effect was optimal designed. This SAW current sensor used 80 MHz SAW dual-channel delay liner differential oscillator, and magnetostrictive film was deposited on the SAW propagation path. The magnetic field of the desired current induces the film’s magnetostrictive strain, changes the SAW phase velocity, then the corresponding differential oscillation frequency change was used to evaluate the applied current. The sensor effects of different magnetostrictive materials (FeCo and FeNi) and film thickness were analyzed to provide ideas on the optimization design of the sensor, and also were verified by experiments. The experimental results showed that, comparing to the FeCo, the current sensor with FeNi as sensitive film had good repeatability, linearity and high sensitivity. |
| DOI：10.11684/j.issn.1000-310X.2017.05.003 |
| 中文关键词: 声表面波，电流传感器，磁致伸缩效应，铁钴，铁镍 |
| 英文关键词: SAW, current sensor, magnetomechanics effect, FeCo,FeNi |
| 基金项目:国家电网公司总部科技项目 (DG71-15-038), 国家自然科学基金资助项目 (11374254) |
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