| 贾利成,何常德,杜以恒,薛晨阳,张文栋.电容式微超声波换能器的设计与电容值测试*[J].,2018,37(4):504-508 |
| 电容式微超声波换能器的设计与电容值测试* |
| Design of capacitance micro ultrasonic transducer and test of capacitance value |
| 投稿时间：2017-10-17 修订日期：2018-06-25 |
| 中文摘要: |
| 本文设计的微电容超声波换能器(CMUT)是由电容阵列组成的超声波传感器,主要是利用电容的改变来实现能量的转换。是基于硅硅键合技术的MEMS电容式超声传感器,制作的传感器误差小,并且工艺流程简单且能进行量产。在利用E4990A阻抗分析仪对传感器进行C—V测试分析而得出其电容的实际值与理论值的误差仅为1.6%。并且利用该仪器测试传感器电容在工作电压下随频率的变化,得出其在工作电压下,频率为400K的时候电容值为617.67PF,为对传感器进行理论计算提供了重要支撑,并且为后续转换电路的设计提供了数据支撑。 |
| 英文摘要: |
| In this paper, the design of micro capacitance ultrasonic transducer (CMUT) is a kind of ultrasonic sensor composed of capacitor array. It is based on the anodic bonding technology of the MEMS capacitive ultrasonic sensor, the core technology for the silicon silicon bonding, the sensor error is small, and the process is simple and can be mass production. The C - V analysis of the sensor is carried out by using the E4990A impedance analyzer, and the error between the actual value and the theoretical value is only 1.6%. And using the E4990A impedance analyzer test sensor capacitance change with frequency in the operating voltage, the working voltage, the frequency is 400k when the capacitance value is 617.67pf, which provides an important support for the theory of sensor calculation, and provides data support for the design of subsequent conversion circuit. |
| DOI：10.11684/j.issn.1000-310X.2018.04.009 |
| 中文关键词: 微机电系统(MEMS) ANSYS 电容超声波换能器(CMUT) E4990A阻抗分析仪 工艺流程 |
| 英文关键词: MEMS ANSYS CMUTs E4990A Impedance analyzer Process flow |
| 基金项目:国家重点研发项目 (2016YFC0101900), 国家杰出青年科学基金项目 (61525107) |
|
| 摘要点击次数: 2041 |
| 全文下载次数: 2236 |
|
查看全文
查看/发表评论 下载PDF阅读器 |
| 关闭 |
|
|
|
