| 王文,贾雅娜,刘鑫璐,薛蓄峰,梁勇.新型声表面波电流传感器*[J].,2018,37(1):8-15 |
| 新型声表面波电流传感器* |
| Research on novel SAW based current sensor |
| 投稿时间：2017-10-20 修订日期：2017-12-25 |
| 中文摘要: |
| 将声表面波（SAW：Surface acoustic wave）技术的快速响应特点与磁致伸缩薄膜的高磁敏特点相结合，可实现一种快速、高灵敏、稳定可靠的新型电流检测技术。传感器由双通道差分式振荡器与沉积在传感通道器件表面的声传播路径上的磁致伸缩薄膜组成。本文基于分层介质中声传播理论及磁致伸缩效应，对声表面波电流传感机理进行了分析，以实现对传感器结构的优化设计。实验研制了采用铁钴（FeCo）薄膜的SAW电流传感器，测试结果表明，该传感器具有快速响应和高灵敏特点。为抑制磁致伸缩薄膜自身的剩磁效应所带来的高磁滞误差，采用的有效途径是将沉积的磁致伸缩薄膜进行图形化设计。试验结果表明，采用栅阵化FeCo薄膜结构的传感器表现出更高检测灵敏度、更好线性及更低的磁滞误差。 |
| 英文摘要: |
| A new current sensing technology with fast response, high sensitivity, and good stability and reliability can be realized by using the surface acoustic wave (SAW) with characteristic of fast response and features of high magnetic susceptibility of magnetostrictive thin films. The sensor consists of a dual channel difference oscillator structure and a magnetostrictive coating deposited on the surface of the sensor chip. Based on the acoustic wave propagation theory in layered structure and magnetostrictive effect, the mechanism of SAW current sensor is analyzed to realize optimal design of sensor structure. The FeCo film coated SAW current sensor was developed and the measured results indicated that the sensor has some specific characteristics as fast response and high sensitivity. To suppress the hysteresis error from the remanence effect of magnetostrictive film itself, a patterned design on magnetostrictive film was considered. The measured results show that the stripped-FeCo coated sensor exerts higher sensitivity, better linearity, and lower hysteresis error. |
| DOI：10.11684/j.issn.1000-310X.2018.01.002 |
| 中文关键词: 声表面波，电流传感器，磁致伸缩效应，铁钴，图形化设计 |
| 英文关键词: Surface acoustic wave, Current sensor, Magnetostrictive effect, FeCo, Patterned design |
| 基金项目:国家自然科学基金项目 (11774381), 中国钢研基金 (16020220Z), 国网基金项目 (DG71-15-038/5442DG150031) |
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