| 李鉴,高翔,刘梦伟,程建政.高次谐波体声波谐振器机械品质因数的测量*[J].,2018,37(1):175-179 |
| 高次谐波体声波谐振器机械品质因数的测量* |
| Measurement of mechanical quality factor of high overtone bulk acoustic resonator |
| 投稿时间：2017-10-30 修订日期：2017-12-27 |
| 中文摘要: |
| 高次谐波体声波谐振器(HBAR)具有高的机械品质因数(QM)和多模谐振谱特性，其在频率控制系统中具有重要应用。对制备的Al/ZnO/Au/Sapphire结构HBAR器件进行了QM的测定，从实际的测试系统出发，给出了它的等效电路，通过一系列分析处理得到了QM随频率的变化曲线。结果表明，QM随频率增加逐渐减小。 |
| 英文摘要: |
| High overtone bulk acoustic resonator (HBAR) exhibits high mechanical quality factor (QM) and multimode properties, which has important applications in frequency control system. The measurement of QM is carried out for HBAR with the structure of Al/ZnO/Au/Sapphire. The equivalent circuit of measured HBAR is proposed based on the experimental test system, and the behavior of QM with several resonance frequencies is obtained by a series of analysis. The results show that QM decreases with increasing frequency. |
| DOI：10.11684/j.issn.1000-310X.2018.01.025 |
| 中文关键词: 高次谐波体声波谐振器,机械品质因数,等效电路 |
| 英文关键词: High overtone bulk acoustic resonator, Mechanical quality factor, Equivalent circuit |
| 基金项目:中国科学院重点部署项目 (QYZDY-SSW-JSC007), 国家自然科学基金项目 (11474304, 11374327) |
|
| 摘要点击次数: 1923 |
| 全文下载次数: 2288 |
|
查看全文
查看/发表评论 下载PDF阅读器 |
| 关闭 |
