| 李红浪,高星,柯亚兵,程利娜,田亚会.宽温度范围SAW应变传感器温度与应变解耦研究*[J].,2018,37(1):16-19 |
| 宽温度范围SAW应变传感器温度与应变解耦研究* |
| Study on temperature and strain decoupling of SAW strain sensor in wide temperature range |
| 投稿时间：2017-10-31 修订日期：2017-12-24 |
| 中文摘要: |
| 本文针对宽温度范围应变测量的温度干扰问题,提出并研究了基于双谐振器的声表面波(Surface acoustic wave, SAW)应变传感器。理论上,结合微扰理论、有限元方法、有效介电常数法分析出双谐振器频率与应变、温度的关系公式,进而推导出应变和温度关于这两组谐振器频率变化的解耦表达式。实验上,搭建宽温度范围的测试平台,在Y+34°切向的石英基片上制作该传感器芯片,测得传感器芯片在30℃~180℃下的频率响应,将测得的谐振器频率代入解耦公式计算得到温度与应变值,与实验中参考温度与应变的值基本吻合,验证了此解耦方法的可行性。 |
| 英文摘要: |
| In this paper, a SAW strain sensor is studied to solve the cross-sensitivity of strain and temperature in wide temperature range . According to the perturbation theory, the finite element method and the effective dielectric constant method, the formula of frequency relate to strain at different temperatures was deduced. Then the decoupling formulas to calculate the strain and temperature were derived. In experiment, a test platform with wide temperature range was built. Two resonators were fabricated on Y+34°cut quartz substrate and the frequency variant of two resonators were measured at 30~180℃. The measured frequencies of the resonators were substituted into the decoupling formulas to obtain the temperature and strain values, which were in good agreement with the referred temperature and strain in the experiment. Therefore, the feasibility of the decoupling method was verified. |
| DOI：10.11684/j.issn.1000-310X.2018.01.003 |
| 中文关键词: 声表面波,应变传感器,宽温度范围 |
| 英文关键词: Surface acoustic wave(SAW) Strain sensor, Wide temperature range |
| 基金项目:中国科学院重点部署项目 (KFZD-SW-415), 国家重点研发计划 (2016YFB0402705), 声学所青年英才计划 (QYNC201616) |
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