| 李俊红,马军,魏建辉,任伟.MEMS压电水听器和矢量水听器研究进展*[J].,2018,37(1):101-105 |
| MEMS压电水听器和矢量水听器研究进展* |
| Research progress of MEMS piezoelectric hydrophone and vector hydrophone |
| 投稿时间：2017-10-31 修订日期：2017-12-26 |
| 中文摘要: |
| 基于微电子机械系统(Micro-electro-mechanical systems, MEMS)制造技术的MEMS 压电水听器和矢量水听器具有小型化、低功耗、低成本、易成阵、无源、噪音低等优点。对基于ZnO薄膜的MEMS水听器和矢量水听器进行了研究,测试结果表明硅微压电水听器的灵敏度为 -192 dB(ref. 1V/mPa),基本达到实用化的要求。MEMS压电矢量水听器等效声压灵敏度为-229.5dB(ref. 1V/μPa),比同类型压阻式MEMS矢量水听器的灵敏度高17dB,但还未达到实用化要求。为了进一步提高MEMS矢量水听器的灵敏度,设计了具有U形槽的压电复合悬臂梁结构和电极串联结构,采用具有更高压电系数的掺钒ZnO薄膜作为压电层,并对MEMS制备工艺进行了改进,有望显著提高MEMS矢量水听器的灵敏度。 |
| 英文摘要: |
| MEMS piezoelectric hydrophone and vector hydrophone have the advantages of miniaturization, low power consumption, low cost, easy to array, low noise, passive. The MEMS hydrophone and vector hydrophone based on ZnO films were studied. The results show that the sensitivity of silicon micro piezoelectric hydrophone is -192 dB (ref. 1V/mPa), which basically meets the practical requirements. The equivalent acoustic pressure sensitivity of MEMS vector hydrophone is -229.5dB (ref. 1V/mPa), which is 17 dB higher than that of the same type of MEMS piezoresistive vector hydrophone, but has not met the practical requirements. In order to further improve the sensitivity of MEMS vector hydrophone, the separatedSelectrodesSseries structure and the piezoelectric composite cantilever structure with U grooves were used in the design of MEMS vector hydrophone, the vanadium doped ZnO film with a higher piezoelectric coefficient was used as piezoelectric layer, and the MEMS process of piezoelectric hydrophone was improved. |
| DOI：10.11684/j.issn.1000-310X.2018.01.015 |
| 中文关键词: MEMS,水听器,ZnO薄膜,灵敏度 |
| 英文关键词: MEMS, Hydrophone, ZnO film, Sensitivity |
| 基金项目:(11074274,11174319,11474304) |
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