| 仇钢,章德,何小悦.超小型声表面波谐振器[J].,2003,22(6):1-5 |
| 超小型声表面波谐振器 |
| Super-small SAW resonators |
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| 中文摘要: |
| 传统声表面波谐振器中的指条反射阵占据了器件的大部分尺寸。由于剪切横波(SH wave)在材料基片的自由端面反射时不产生模式转换,因此可望利用自由端面来代替SH型声表面波谐振器中的指条反射阵,实现超小型低损耗的新型声表面波谐振器。本文首先用COM理论对新结构的谐振器进行了讨论,并且在实验上实现了120MHz至440MHz的几个单端谐振器(ST36?石英基片),其插入损耗从0.87dB至1.29dB,面积缩小到传统谐振器的50％至25％。 |
| 英文摘要: |
| The reflective arrays occupy a large amount of areas of a conventional surface acoustic wave (SAW) resonator. Due to lack of mode conversion on the reflection of a shear horizontal wave (SH wave) at the free edges of the substrate, it is possible to replace reflective arrays by free edges in the SH type SAW resonators, and to realize low-loss resonators with super small sizes. In this paper, the properties of SH-SAW resonators are analyzed with the COM theory and some one-port resonators on ST-36o quartz substrate from 120MHz to 440MHz are fabricated , the insertion loss being about from 0.87dB to 1.29dB. Compared with conventional SAW resonators, these SH type SAW devices achieve both in the low insertion loss and in reduction in size by 50% to 25%. |
| DOI：10.11684/j.issn.1000-310X.2003.06.001 |
| 中文关键词: 谐振器 SH型声表面波 端面反射 |
| 英文关键词: Resonators SH-SAW Edge reflection |
| 基金项目: |
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