| 杨楚威,李俊红,黄歆,汪承灏.圆形振动膜ZnO压电微传声器的研制[J].,2006,25(4):197-200 |
| 圆形振动膜ZnO压电微传声器的研制 |
| Silicon based ZnO piezoelectric micro-microphone with circular vibrating film |
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| 中文摘要: |
| 本文介绍了一种新型圆形振动膜ZnO压电微传声器的制备,并对传声器制备的工艺过程进行了较为详细的描述。圆形振动膜的压电传声器与以前方形振动膜结构设计相比,较大幅度提高了传声器的灵敏度和成品率,灵敏度达到-70dB(相对于1V/Pa),成品率达到80%。 |
| 英文摘要: |
| This paper presents the fabrication of a silicon based ZnO piezoelectric micro- microphone with novel circular vibrating film.Micromachined techniques to fabricate the device are described in detail.The circular vibrating film structure of this microphone is a modification of the rectangular one,and the performances of the device are improved. The sensitivity is-70dB(ref.1V/Pa)and the rate of finished product is 80%. |
| DOI：10.11684/j.issn.1000-310X.2006.04.001 |
| 中文关键词: 硅微传声器 圆形振动膜 压电薄膜 ZnO |
| 英文关键词: Silicon micro-microphone Circular vibrating film Piezoelectric film ZnO |
| 基金项目:国家自然科学基金青年科学基金项目(10204021);国家自然科学基金SOC重点基金项目(90207003) |
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