| 朱明博,刘梦伟,汪承灏.基于ZnO薄膜的高次谐波体声波谐振器的研究[J].,2013,32(3):212-216 |
| 基于ZnO薄膜的高次谐波体声波谐振器的研究 |
| Studies of high overtone bulk acoustic resonator with ZnO film |
| 投稿时间：2013-04-08 |
| 中文摘要: |
| 基于氧化锌(ZnO)作压电层和蓝宝石作基底的高次谐波体声波谐振器(HBAR)，采用不同电极材料和溅射方法进行优化。优化选定镀铬-金/氧化锌/铬-金/蓝宝石结构。对制备的器件进行了测试分析，结果显示，具有多模谐振特性的HBAR器件在2.87 GHz Q值达到43000。根据一维Mason等效电路模型，HBAR器件还进行了理论仿真，结果表明理论结果与实测值基本一致。 |
| 英文摘要: |
| Several materials and methods of high overtone bulk acoustic resonator (HBAR) with ZnO film as piezoelectric layer and sapphire as substrate were studied, and the structure of Cr-Au/ZnO/Cr-Au/Sapphire was optimized. According to measurements the fabricated HBAR presents multimode resonances in a wide frequency range, with the highest Q of 43,000 at about 2.87 GHz, which agrees with the simulation results by software, based on one-dimensional Mason equivalent circuit model. |
| DOI：10.11684/j.issn.1000-310X.2013.03.008 |
| 中文关键词: 体声波谐振器，Q值，ZnO薄膜，Mason模型 |
| 英文关键词: Bulk acoustic wave resonator, Quality factor, ZnO film, Mason model |
| 基金项目: |
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