| 何常德,张盛东,张斌珍,张文栋,薛晨阳.面向水下应用的电容式微机械超声换能器*[J].,2022,41(3):405-411 |
| 面向水下应用的电容式微机械超声换能器* |
| Capacitive micromachined ultrasonic transducer for underwater application |
| 投稿时间：2021-04-23 修订日期：2022-05-06 |
| 中文摘要: |
| 电容式微机械超声换能器具有宽频带和易于制造二维阵列等优势,已经成为一种重要的新型超声换能器技术。本文针对图像声纳系统对新型超声换能器的迫切需求,提出了一种电容式微机械超声换能器结构和参数,并利用硅微加工技术制备出了该换能器,最后对其主要性能参数进行了测试和分析。测试结果表明该换能器具有发射和接收超声波的功能,中心工作频率为1.965MHz,6dB相对带宽达到109.4%,在1MHz、2MHz和3MHz频率时的接收灵敏度分别为-218.29dB、-219.39dB和-218.11dB。本文研制的电容式微机械超声换能器显示出了优秀的宽频带特性,且工作频率和接收灵敏度性能均基本满足了高频图像声纳系统的需求。 |
| 英文摘要: |
| Capacitive micromachined ultrasonic transducer (CMUT) has many advantages, such as broadband, and easy fabrication of two-dimensional array and so on. It has become an important ultrasonic transducer technology. Imaging sonar system has an urgent demand for new ultrasonic transducers. This paper designed the structure and parameters of CMUT, also fabricated the CMUT by silicon micromachining technology. Finally, the main performance parameters of the transducer was tested and analyzed. The test results show that the transducer has the function of transmitting and receiving ultrasonic. Its center operating frequency is 1.965MHz. Its fractional bandwidth at 6dB is 109.4%. Its receiving sensitivities are -218.29dB, -219.39dB and -218.11dB at 1MHz, 2MHz and 3MHz respectively. The CMUT shows excellent broadband characteristics. Its working frequency and receiving sensitivity basically meet the requirements of high frequency imaging sonar system. |
| DOI：10.11684/j.issn.1000-310X.2022.03.010 |
| 中文关键词: 电容式微机械超声换能器 二维阵列 三维超声成像 晶圆键合 宽频带 |
| 英文关键词: capacitive micromachined ultrasonic transducer 2D array 3D ultrasonic imaging wafer bonding broadband |
| 基金项目:国家重点研发计划资助(2016YFC0105004)，国家自然科学基金项目(61927807) |
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