文章摘要
王一骝,刘明华,何世堂,刘建生,李红浪.ST-X石英基片上铬栅阵中单根栅条反射系数实验研究[J].,2008,27(4):294-298
ST-X石英基片上铬栅阵中单根栅条反射系数实验研究
Experimental study on the reflection coefficient of chromium gratings strip on a ST-X quartz
  
中文摘要:
      精确的栅条反射系数对于声表面波器件的设计至关重要。本文利用网络分析仪的时域功能,采用短脉冲方法实验研究了ST-X石英基片上铬栅阵中单根栅条的反射系数。并推导出计算反射系数的公式。实验测量了不同铬膜厚度条件下单根指条的反射系数,再对实验结果作最小方差法拟合,得到反射系数随铬膜厚度变化的表达式,即反射系数中压电短路贡献和铬的力学负载贡献之和。最后将实验结果与采用有限元方法计算的理论结果比较,发现两者基本吻合。
英文摘要:
      The strip reflection coefficient,which includes not only amplitude information but also phase information,is a key parameter in Surface Acoustic Wave(SAW)device design.In this paper,the experimental study on the reflection coefficient of chromium grat- ings strip is implemented on using the impulse response method with the aid of network an- alyzer time function.The reflection coefficient experimental expression is derived first. Then,experiments are implemented to measure reflection coefficients with different chromi- um strip thickness.Finally,by means of minimum variance curve fitting method,the rela- tionship of the reflection coefficient v.s.chromium thickness is obtained,which shows that both piezoelectric short-circuiting and mass loading contributions to the reflection coeffi- cient is determined.Experimental result agrees well with theoretical result by Finite Ele- ment Method(FEM).
DOI:10.11684/j.issn.1000-310X.2008.04.011
中文关键词: 反射系数  栅条  短脉冲法
英文关键词: Reflection coefficient  Grating strip  Impulse response method
基金项目:
作者单位
王一骝 中国科学院声学研究所,北京,100190 
刘明华 中国科学院声学研究所,北京,100190 
何世堂 中国科学院声学研究所,北京,100190 
刘建生 中国科学院声学研究所,北京,100190 
李红浪 中国科学院声学研究所,北京,100190 
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