| 高鹏飞,何常德,张彦军,张文栋,王红亮,任勇峰,党荣,李一凡,王子渊,孟亚楠,沈姝君.cMUT阵元的声学分析与环形扫描成像*[J].,2022,41(2):293-300 |
| cMUT阵元的声学分析与环形扫描成像* |
| Sound analysis of cMUT element and circular scanning imaging |
| 投稿时间：2021-08-26 修订日期：2022-02-27 |
| 中文摘要: |
| 电容式微机械超声换能器(cMUT)具有宽带宽、灵敏度高、机械阻抗低和与电子电路集成制造等优点。由于超声换能器声场设计的好坏决定了成像质量的优劣，为了明确阵元参数与辐射声场的关系，该文对不同的阵元参数进行了计算仿真。与压电陶瓷超声换能器的结构不同，cMUT阵元是由多个电容单元(cell)并联构成。因此分析了cell的半径、cell数量、间距、振动频率等阵元参数与辐射声场分布、远近场分界点、辐射声压、指向性的关系，并进行了声轴声压与指向性实验测试验证。理论与实验测试结果基本一致。通过仿真计算，选用一种已制备的指向性强、发射性能好的cMUT单阵元器件对鸡骨进行了环形扫描和成像，实现了对生物体组织横截面的超声CT成像，验证了所制备的cMUT器件的可用性。此研究对工业与医学成像领域具有重要的参考价值。 |
| 英文摘要: |
| Capacitive micromechanical ultrasonic transducer (cMUT) has the advantages of wide bandwidth, high sensitivity, low mechanical impedance and integrated manufacturing with electronic circuits. Because the sound field design of ultrasonic transducer determines the imaging quality, in order to clarify the relationship between array parameters and radiated sound field, different array parameters are calculated and simulated in this paper. Different from the structure of the piezoelectric ultrasonic transducer, cMUT element is made up of multiple (cell) shunt capacitor unit. Therefore, the relationship between cell parameters such as cell radius, cell number, spacing and vibration frequency and radiated sound field distribution, far-near field boundary point, radiated sound pressure and directivity is analyzed, and the experimental test of sound axis sound pressure and directivity is carried out. The theoretical results are basically consistent with the experimental results. Through simulation calculation, a prepared cMUT single array component with strong directivity and good emission performance is selected to scan and image the chicken bone, realize the ultrasonic CT imaging of the cross section of biological tissue, and verify the availability of the prepared cMUT device. This research has important reference value for the field of industrial and medical imaging. |
| DOI：10.11684/j.issn.1000-310X.2022.02.016 |
| 中文关键词: 电容式微机械超声换能器 声场 指向性 轴向声压 环形扫描成像 |
| 英文关键词: Capacitive micromechanical ultrasonic transducer sound field directivity axial sound pressure circular scanning imaging |
| 基金项目:国家重点研发计划 (批准号：2018YFF0110500) 资助课题：基于MEMS技术的阵列式微型声压传感器研制 中北大学电子测试技术国家重点实验室 (批准号：6142001200408) 资助课题：面向图像声纳的新型宽频带微电容超声换能器技术研究 国家重大科学仪器研制项目 (批准号： 61927807) 资助课题：基于高密度cMUT面阵的乳腺三维超声CT成像系统研究, |
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