| 邓明晰.Zno-SiO2-Si结构中压电薄膜C轴取向等参数对声表面波的影响[J].,1997,16(2):18-23 |
| Zno-SiO2-Si结构中压电薄膜C轴取向等参数对声表面波的影响 |
| The effects of the c-axis orientation of the ZnO film and other parameters in ZnO-SiO2-Si layered structure on SAW |
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| 中文摘要: |
| 当Zno－SiO2－Si结构中的Zno薄膜c轴取向偏离基片法向时，将对声表面波传播速度、机电耦合系数等参量产生影响，本文对此问题进行了理论分析和数值计算；同时还讨论了本结构中影响声表面波束偏的一些参数． |
| 英文摘要: |
| The important parameters of SAW devices, the SAW velocity and the me chanico-electrical coupling coefficient, will be affected by the c-axis orientation of ZnO film in a ZnO-SiO2-Si layered structure. In the present paper, the problem is studied the oretically. Moreover, beamsteering of SAW is also investigated for the layered structure. |
| DOI：10.11684/j.issn.1000-310X.1997.02.006 |
| 中文关键词: ZnO薄膜 c轴取向 声表面波 束偏 |
| 英文关键词: ZnO film C-axis orientation Surface acoustic wave Beamsteering |
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