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第 41 卷 第 1 期                                                                       Vol. 41, No. 1
             2022 年 1 月                          Journal of Applied Acoustics                   January, 2022

             ⋄ 研究报告 ⋄



                 面向CMUT声发射特性的驱动电路优化设计                                                                  ∗






                             李一凡 张国军            †   何常德 王子渊 高鹏飞 孟亚楠


                                     (中北大学仪器与电子学院       动态测试省部共建实验室        太原   030051)

                摘要：根据电容式微机械超声换能器 (CMUT) 的工作原理，设计了用于驱动 CMUT 发射超声波的电路。通过
                适当的串行匹配，消除了脉冲激励信号的过冲现象。在此基础上进一步探究了脉冲激励参数对 CMUT 声发射
                特性影响。结果表明，随着激励脉冲个数的增加，CMUT 输出超声信号的有效带宽逐渐变窄，二次谐波逐渐增
                强；随着激励脉冲占空比的增加，CMUT 的输出声压先增大后减小，二次谐波先减小后增大。该文研究结果为
                CMUT 的测试与应用奠定了基础。
                关键词：电容式微机械超声传感器；驱动电路；串行匹配；声发射特性
                中图法分类号: TN791; TB552           文献标识码: A          文章编号: 1000-310X(2022)01-0168-05
                DOI: 10.11684/j.issn.1000-310X.2022.01.020






              Optimal design of drive circuit for CMUT acoustic transmission characteristics



                   LI Yifan ZHANG Guojun HE Changde WANG Ziyuan GAO Pengfei MENG Yanan

                        (School of Instrument and Electronics, North University of China, State key Laboratory of Dynamic
                                            Testing Technology, Taiyuan 030051, China)

                 Abstract: According to the operating principle of the capacitive micromachined ultrasonic transducer
                 (CMUT), a circuit for driving the CMUT to emit ultrasonic wave is designed. Through proper serial ter-
                 mination, the overshoot phenomenon of the pulse excitation signal is eliminated. On this basis, the influence
                 of pulse excitation parameters on the acoustic transmission characteristics of CMUT is further explored. The
                 research results show that as the number of excitation pulses increases, the effective bandwidth of the CMUT
                 output ultrasonic signal gradually narrows, and the second harmonic gradually increases; with the increase of
                 the excitation pulse duty cycle, the output sound pressure of the CMUT first increases and then decreases,
                 and the second harmonic first decreases and then increases. The research results of this paper will lay the
                 foundation for the testing and application of the CMUT.
                 Keywords: Capacitance micromachined ultrasonic transducer; Drive circuit; Series termination; Characteristic
                 of acoustic transmission







             2021-03-12 收稿; 2021-05-31 定稿
             国家重大科研仪器研制项目 (61927807), 国家重点研发计划项目 (2016YFC0105004)
             ∗
             作者简介: 李一凡 (1997– ), 男, 山东东营人, 硕士研究生, 研究方向: 超声成像系统硬件设计。
             † 通信作者 E-mail: Zhangguojun1977@nuc.edu.cn
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