Page 218 - 《应用声学》2023年第4期

第 42 卷 第 4 期 Vol. 42, No. 4
2023 年 7 月 Journal of Applied Acoustics July, 2023

⋄ 综述 ⋄

固液悬浮体系下超声波浓度测量技术进展 ∗

陈俊羽 1 张 乐 1† 鲍 锦 1 曹秀华 2 任海东 2 付振晓 2† 陈 浩 1

(1 江苏师范大学物理与电子工程学院 江苏省先进激光材料与器件重点实验室 徐州 221116)
(2 广东风华高新科技股份有限公司新型电子元器件关键材料与工艺国家重点实验室 肇庆 526020)
摘要：在工业生产和科学实验中，固液悬浮体系是一种非常重要的流体类型，其浓度与均匀性变化直接决定了
最终制品的物理化学性能及服役稳定性。对其进行实时、原位、高精度测量具有重要意义。因为超声波技术具
有非接触、精度高、响应速度快等优点，所以该文重点介绍了基于该技术实现固液悬浮体系浓度测量的方法，
回顾了国内外发展状况，特别是对该技术在浆液混合过程监控方向的应用做出了介绍和总结。最后，对该领域
的发展趋势进行了展望。
关键词：超声波；固液悬浮体系；浓度；过程监控
中图法分类号: TB51+7; TV698.1+5; T-19 文献标识码: A 文章编号: 1000-310X(2023)04-0880-09
DOI: 10.11684/j.issn.1000-310X.2023.04.024

Progress of ultrasonic concentration measurement technology in solid-liquid

suspension system

CHEN Junyu 1 ZHANG Le 1 BAO Jin 1 CAO Xiuhua 2 REN Haidong 2 FU Zhenxiao 2 CHEN Hao 1

(1 Jiangsu Key Laboratory of Advanced Laser Materials and Devices, School of Physics and Electronic Engineering, Jiangsu
Normal University, Xuzhou 221116, China)
(2 State Key Laboratory of Advanced Materials and Electronic Components, Guangdong Fenghua Advanced Technology Co.,
Ltd., Zhaoqing 526020, China)

Abstract: In industrial production and scientific experiments, the solid-liquid suspension system is a very
important type of fluid, and its concentration and uniformity changes directly determine the physical and
chemical properties and service stability of the final products. It is of great significance to measure it in
real time, in situ and with high precision. Because ultrasonic technology had the advantages of non-contact,
high precision, and fast response speed, the methods for realizing concentration measurement of solid-liquid
suspension system based on this technology was mainly introduced, and its development status at home and
abroad was reviewed. In particular, the application of this technology in the monitoring direction of slurry
mixing process was also introduced and summarized. Finally, the development trend of this field was prospected.
Keywords: Ultrasonic wave; Solid liquid suspension system; Concentration; Process monitor

2022-04-20 收稿; 2022-08-02 定稿
国家重点研发计划项目 (2021YFB3501700), 国家自然科学基金项目 (61975070, 51902143, 61971207), 江苏省高校优势学科建
∗
设项目 (PAPD), 江苏省重点研发项目 (BE2019033), 江苏省自然科学基金项目 (BK20191467), 江苏省研究生科研与实践创新计
划项目 (SJCX21_1135), 江苏省国际科技合作项目 (BZ2019063, BZ2020045, BZ2020030), 江苏省高校自然科学研究基金项目
(19KJB430018, 20KJA430003), 徐州市科技创新专项 (KC19250, KC20201, KC20244), 新型电子元器件关键材料与工艺国家重点实
验室开放课题 (FHR-JS-202011017)
作者简介: 陈俊羽 (1998– ), 男, 江苏连云港人, 硕士研究生, 研究方向: 超声波监测, 过程控制与研究。
† 通信作者 E-mail: zhangle@jsnu.edu.cn; fuzx@china-fenghua.com