Page 107 - 《应用声学）》2023年第5期

第 42 卷 第 5 期 Vol. 42, No. 5
2023 年 9 月 Journal of Applied Acoustics September, 2023

⋄ 研究报告 ⋄

微槽式光学谐振腔超声传感效应验证 ∗

吴博丰 崔建功 楚晓霞 祝 敏 赵荣宇 张文栋
张国军 王任鑫 杨玉华 †

(中北大学 省部共建动态测试技术国家重点实验室 太原 030051)

摘要：光学微腔的高灵敏度主要源于其结构在时间和空间上对光场的局域增强作用和频率选择作用。其结构
在垂直于波导方向上形成了高反射的边界，进而形成了一种回声腔，使光在波导内来回反射，从而增强了波导
内部的光场强度。当外界存在微小的压力波动时，它将引起波导内部的介电常数和压力场的变化，从而改变谐
振腔内的模式场分布和传输特性，据此可以实现对微小的压力波动进行高灵敏度检测。该文设计了一种高品
质因子 (Q) 的光波导微槽式环形谐振腔超声传感器，完成器件制备并搭建了测试系统，依据倏逝波效应实现
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了超声探测。测试结果表明，该传感器的 Q 为 1.38×10 ，在 800 kHz∼1 MHz 范围内响应平坦，在 900 kHz 的
信噪比可以达到 27 dB，灵敏度达到 −168 dB。该文设计的传感器可以为水声探测等领域的研究提供关键技
术支持。
关键词：高品质因子；微槽式谐振腔；倏逝波效应；超声传感
中图法分类号: TN256 文献标识码: A 文章编号: 1000-310X(2023)05-0999-06
DOI: 10.11684/j.issn.1000-310X.2023.05.013

Verification of ultrasonic sensing effect in microgroove optical resonant cavity

WU Bofeng CUI Jiangong CHU Xiaoxia ZHU Min ZHAO Rongyu ZHANG Wendong

ZHANG Guojun WANG Renxin YANG Yuhua

(State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China)
Abstract: The high sensitivity of optical microcavities is mainly due to its structure’s localized enhancement
and frequency selection effects on the optical field in both time and space. Its structure forms a highly reflective
boundary perpendicular to the waveguide direction, forming an echo cavity that allows light to reflect back and
forth within the waveguide, thereby enhancing the intensity of the light field inside the waveguide. When there
are small pressure fluctuations outside, it will cause changes in the dielectric constant and pressure field inside
the waveguide, thereby changing the mode field distribution and transmission characteristics in the resonant
cavity. Based on this, high sensitivity detection of small pressure fluctuations can be achieved. In this paper,
a high quality factor (Q) optical waveguide microgroove resonant cavity ultrasonic sensor is designed, and the
device preparation and testing system are completed. The ultrasound detection was achieved based on the
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evanescent wave effect. The experimental results demonstrate that the sensor has a quality factor of 1.38×10 ,
with a flat frequency response from 800 kHz to 1 MHz, a signal-to-noise ratio of 27 dB at 900 kHz, and a
sensitivity of −168 dB. The designed sensor provides key technical support for research in underwater acoustic
detection and other related fields.
Keywords: High quality factors; Microslot resonator; Evanescent field effect; Ultrasonic sensing
2023-04-25 收稿; 2023-06-13 定稿
国家自然科学基金面上项目 (62274149), 山西省基础研究计划资助项目 (202103021224203), 山西省 “1331 工程” 重点学科建设计划资
∗
助项目
作者简介: 吴博丰 (1996– ), 男, 吉林榆树人, 硕士研究生, 研究方向: 光学微腔传感。
† 通信作者 E-mail: yangyuhua@nuc.edu.cn