Page 46 - 《应用声学）》2023年第5期
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第 42 卷 第 5 期                                                                       Vol. 42, No. 5
             2023 年 9 月                          Journal of Applied Acoustics                 September, 2023

             ⋄ 研究报告 ⋄



                                 超声辅助电镀的仿真与实验                                         ∗




                                            王文亚     1   傅 波    2†    黄清宇      3



                                              (1 电子科技大学成都学院       成都   611731)
                                              (2 四川大学机械工程学院       成都   610065)
                                       (3 成都工业职业技术学院智能制造与汽车学院            成都   610213)
                摘要：为了提高镀层的表面质量，提出了一种超声辅助电镀的方法。超声的空化与搅拌作用可以影响电镀的
                电沉积过程。设计了合理的换能器结构，并搭建了超声辅助电镀装置。通过对模型进行压电声学场与电镀场
                耦合仿真分析，结果表明：在硫酸铜电解液，镀铜时间 60 s、电压 300 V 条件下，进行超声辅助电镀，镀层厚度分
                布均匀，镀层中部电流密度分布均匀，边缘最大电流密度是未加超声的 2 倍左右。基于仿真结果，进行相同的
                实验测试，结果表明：超声辅助电镀可以提高镀层的均匀性，减少铜颗粒表面的杂质，提高表面的光洁度。阴极
                样品距离换能器头部位置在 60 mm 左右，镀层质量良好。
                关键词：超声波；电镀；压电声学；耦合分析；边缘效应
                中图法分类号: TQ153.1           文献标识码: A          文章编号: 1000-310X(2023)05-0938-10
                DOI: 10.11684/j.issn.1000-310X.2023.05.006




                        Simulation and experiment of ultrasonic assisted electroplating


                                       WANG Wenya    1  FU Bo 2   HUANG Qingyu   3

                     (1 Chengdu College of University of Electronic Science and Technology of China, Chengdu 611731, China)
                              (2 School of Mechanical Engineering, Sichuan University, Chengdu 610065, China)
                              (3 Chengdu Vocational & Technical College of Industry, Chengdu 610213, China)

                 Abstract: In order to improve the surface quality of the coating, an ultrasonic-assisted electroplating method
                 was proposed. Ultrasonic cavitation and stirring can affect the electrodeposition process of electroplating. A
                 reasonable transducer structure was designed and an ultrasonic assisted electroplating device was built. The
                 coupling simulation analysis of piezoelectric acoustic field and electroplating field was analyzed. Results show
                 that under the condition of copper sulfate electrolyte, copper plating time 60 s, and voltage 300 V, ultrasonic-
                 assisted electroplating coating thickness distribution is uniform, the current density distribution in the middle
                 of the coating is uniform, and the maximum current density at the edge is nearly 2 times larger than that
                 without ultrasound. Based on the simulation results, the same experimental tests were carried out. The results
                 show that ultrasonic-assisted electroplating can improve the uniformity of the coating, reduce the impurities
                 on the surface of copper particles, and improve the surface finish. When the cathode sample is about 60 mm
                 away from the head of the transducer, the coating quality is good.
                 Keywords: Ultrasonic; Electroplate; Piezoelectric acoustic; Coupling analysis; Edge effect

             2023-03-10 收稿; 2023-05-16 定稿
             四川省科技计划资助项目 (2020YFG0117)
             ∗
             作者简介: 王文亚 (1988– ), 女, 山西大同人, 讲师, 研究方向: 机械设计及理论。
              通信作者 E-mail: bofu@scu.edu.cn
             †
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