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第 41 卷 第 1 期 Vol. 41, No. 1
2022 年 1 月 Journal of Applied Acoustics January, 2022
⋄ 研究报告 ⋄
SAW谐振器谐振频率微秒级快速检测方法 ∗
王威威 1,2 卢孜筱 2,3 田亚会 1,2 李红浪 2,3†
(1 中国科学院声学研究所 北京 100190)
(2 中国科学院大学 北京 100049)
(3 国家纳米科学中心 中国科学院纳米科学卓越创新中心 北京 100190)
摘要：针对高速旋转环境下的谐振式声表面波 (SAW) 传感器信号快速检测，提出基于回波损耗测量原理的
SAW 谐振器谐振频率微妙级快速检测方法。对 SAW 谐振器进行线性扫频激励的过程中，将反射信号经功率
检波与比较器转换为数字脉冲信号，使用计时器实时计算脉冲信号中心对应频率快速求得 SAW 传感器谐振
频率。在 8000 r/min 转速范围内对 SAW 谐振器在 700 kHz 带宽内进行检测实验，最多用时 35 µs，相对于毫秒
级的传统 SAW 谐振器谐振频率检测方法，速度提高了两个数量级。
关键词：声表面波；谐振频率；回波损耗；快速检测
中图法分类号: TN85 文献标识码: A 文章编号: 1000-310X(2022)01-0119-05
DOI: 10.11684/j.issn.1000-310X.2022.01.014
Microsecond fast detection method for SAW resonator resonance frequency
WANG Weiwei 1,2 LU Zixiao 2,3 TIAN Yahui 1,2 LI Honglang 2,3
(1 Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China)
(2 University of Chinese Academy of Sciences, Beijing 100049, China)
(3 National Center for Nanoscience and Technology, CAS Center for Excellence in Nanoscience, Beijing 100190, China)
Abstract: For the rapid detection of the resonant surface acoustic wave (SAW) sensor signal in a high-speed
rotating environment, a method for rapid detection of the resonant frequency of SAW resonators based on the
principle of return loss measurement is proposed. In the process of linear sweep frequency excitation of the SAW
resonator, the reflected signal is converted into a digital pulse signal by the power detection and comparator, and
the resonant frequency of the SAW sensor is quickly obtained by using a timer to calculate the corresponding
frequency of the pulse signal center in real time. The SAW resonator is tested in a 700 kHz bandwidth within
the range of 8000 r/min speed, and the maximum time is 35 µs. Compared with the traditional SAW resonator
resonant frequency detection method in milliseconds, the speed is increased by two orders of magnitude.
Keywords: Surface acoustic wave; Resonant frequency; Return loss; Rapid detection
2021-02-20 收稿; 2021-04-07 定稿
国家重点研发项目 (2019YFB1405403), 湖南省重点研发项目 (2019KG2111), 宁波市重点研发项目 (2019B10122)
∗
作者简介: 王威威 (1993– ), 男, 河南周口人, 硕士研究生, 研究方向: 信号与信息处理。
通信作者 E-mail: lhl@nanoctr.cn
†
