Page 83 - 《应用声学》2022年第3期

第 41 卷 第 3 期 Vol. 41, No. 3
2022 年 5 月 Journal of Applied Acoustics May, 2022

⋄ 研究报告 ⋄

面向水下应用的电容式微机械超声换能器 ∗

何常德 1,2,3 张盛东 1,2† 张斌珍 3 张文栋 3 薛晨阳 3

(1 北京大学信息工程学院 深圳 518055)
(2 北京大学信息科学技术学院 北京 100871)
(3 中北大学动态测试技术省部共建实验室 太原 030051)

摘要：电容式微机械超声换能器具有宽频带和易于制造二维阵列等优势，已经成为一种重要的新型超声换能
器。该文针对图像声呐系统对新型超声换能器的迫切需求，提出了一种电容式微机械超声换能器结构和参数，
并利用硅微加工技术制备出了该换能器，最后对其主要性能参数进行了测试和分析。测试结果表明该换能器
具有发射和接收超声波的功能，中心工作频率为 1.965 MHz，6 dB 相对带宽达到 109.4%，在 1 MHz、2 MHz 和
3 MHz 频率时的接收灵敏度分别为 −218.29 dB、−219.39 dB 和 −218.11 dB。该文研制的电容式微机械超声
换能器显示出了优秀的宽频带特性，且工作频率和接收灵敏度性能均基本满足了高频图像声呐系统的需求。
关键词：电容式微机械超声换能器；二维阵列；三维超声成像；晶圆键合；宽频带
中图法分类号: TB552 文献标识码: A 文章编号: 1000-310X(2022)03-0405-07
DOI: 10.11684/j.issn.1000-310X.2022.03.010

Capacitive micromachined ultrasonic transducer for underwater applications

HE Changde 1,2,3 ZHANG Shengdong 1,2 ZHANG Binzhen 3
ZHANG Wendong 3 XUE Chenyang 3

(1 School of Electronic and Computer Engineering, Peking University, Shenzhen 518055, China)
(2 School of Electronics Engineering and Computer Science, Peking University, Beijing 100871, China)
(3 State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China)

Abstract: Capacitive micromachined ultrasonic transducer (CMUT) has many advantages, such as broadband,
and easy fabrication of two-dimensional array and so on. It has become an important ultrasonic transducer.
Imaging sonar system has an urgent demand for new ultrasonic transducers. This paper designed the structure
and parameters of CMUT, also fabricated the CMUT by silicon micromachining technology. Finally, the main
performance parameters of the transducer were tested and analyzed. The test results show that the transducer
has the function of transmitting and receiving ultrasonic. Its center operating frequency is 1.965 MHz. Its
fractional bandwidth at 6 dB is 109.4%. Its receiving sensitivities are −218.29 dB, −219.39 dB and −218.11 dB
at 1 MHz, 2 MHz and 3 MHz respectively. The CMUT shows excellent broadband characteristics. Its working
frequency and receiving sensitivity basically meet the requirements of high frequency imaging sonar system.
Keywords: Capacitive micromachined ultrasonic transducer; 2D array; 3D ultrasonic imaging; Wafer
bonding; Broadband

2021-04-23 收稿; 2021-05-23 定稿
国家重点研发计划项目 (2016YFC0105004), 国家自然科学基金项目 (61927807)
∗
作者简介: 何常德 (1979– ), 男, 河南林州人, 博士研究生, 研究方向: CMUT 换能器。
† 通信作者 E-mail: zhangsd@pku.edu.cn