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第 41 卷 第 3 期 Vol. 41, No. 3
2022 年 5 月 Journal of Applied Acoustics May, 2022
⋄ 综述 ⋄
厚度模压电超声换能器无源声学材料研究进展 ∗
陈 燕 1 林兴国 1 李 明 2 袁懋诞 1† 纪轩荣 1†
(1 省部共建精密电子制造技术与装备国家重点实验室 广东工业大学机电工程学院 广州 510006)
(2 中广核检测技术有限公司 深圳 215004)
摘要:厚度模压电超声换能器作为超声波发射、接收以及电信号间转换的载体,是超声成像与检测系统的核心
器件,一般由压电层、匹配层和背衬层 3 部分组成。超声换能器的性能一定程度上决定着整体超声设备的性能,
影响了其在工业、医学、军事等领域的应用。该换能器的关键性能指标 (带宽、灵敏度) 除了受到压电层的影响,
还与匹配层、背衬层等无源声学材料的设计密切相关。该文综述了近年来厚度模压电超声换能器无源声学材
料 (匹配层、背衬层和声透镜) 的研究进展,提出了当前该类材料面临的难题和解决途径,并对其未来发展方向
进行了展望。
关键词:厚度模;压电超声换能器;匹配层;背衬层;声透镜
中图法分类号: TB552; O426.9 文献标识码: A 文章编号: 1000-310X(2022)03-0490-13
DOI: 10.11684/j.issn.1000-310X.2022.03.020
Research progress of passive acoustic materials for thickness-mode
piezoelectric ultrasonic transducers
CHEN Yan 1 LIN Xingguo 1 LI Ming 2 YUAN Maodan 1 JI Xuanrong 1
(1 State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical
Engineering, Guangdong University of Technology, Guangzhou 510006, China)
(2 CGN Inspection Technology of Company, Shenzhen 215004, China)
Abstract: Thickness-mode piezoelectric ultrasonic transducer is the core device in the ultrasonic imaging
and detection system, which can realize ultrasonic transmission, reception and signal conversion. The main
components of a transducer include piezoelectric(or active) layer, matching layer and backing layer. The
performances of the transducers determine the overall properties of ultrasound equipment, and affect their
applications in detection, medicine and military, etc. In order to improve the performance of the ultrasonic
transducer, passive acoustic functional materials such as matching layer and backing layer have also drawn
much attention in enhancing the transducer properties except for improving the piezoelectric layer. In this
paper, the research and developing trend of passive acoustic materials such as matching layers, backing layers
and acoustic lens was reviewed and prospected.
Keywords: Thickness-mode; Piezoelectric ultrasonic transducer; Matching layer; Backing layer; Acoustic lens
2021-05-06 收稿; 2021-11-30 定稿
国家自然科学基金项目 (11804059, 51975131, 51805097), 广东省引进创新创业团队项目 (2016ZT06G375)
∗
作者简介: 陈燕 (1983– ), 女, 河北人, 博士, 研究方向: 超声换能器, 无损检测, 智能材料。
† 通信作者 E-mail: mdyuan@gdut.edu.cn; xr.ji@gdut.edu.cn