Page 90 - 《应用声学》2022年第3期

第 41 卷 第 3 期 Vol. 41, No. 3
2022 年 5 月 Journal of Applied Acoustics May, 2022

⋄ 研究报告 ⋄

基于指条厚度优化的冷凝式声表面波气体传感器

灵敏度提升方法

邹亮桃 1,2 刘久玲 1† 游 然 1,2 刘明华 1 任 伟 1 何世堂 1
(1 中国科学院声学研究所 北京 100190)

(2 中国科学院大学 北京 100049)
摘要：该文通过对声表面波谐振器指条厚度的优化提升了冷凝式气体传感器的灵敏度。基于流固耦合理论，
利用有限元商业软件建立了有液膜负载和无液膜负载下的多物理场三维周期模型，并提取了相应的耦合模参
量，利用耦合模模型及 P 矩阵级联技术，计算了不同指条厚度下液膜负载引起的传感器响应，获得了冷凝式声
表面波气体传感器灵敏度随指条厚度的变化关系。实验中制备了 6 种不同电极厚度的声表面波谐振器，并利
用甲基膦酸二甲酯实验样品完成了传感器的响应测试，验证了理论分析的正确性。结果表明，冷凝式声表面波
气体传感器的灵敏度随指条厚度的增加先变大后减小，最优归一化电极厚度为 6.4%∼7.6% 之间。该研究结果
对进一步提升传感器灵敏度具有重要意义。
关键词：冷凝式声表面波气体传感器；流固耦合理论；指条厚度优化；灵敏度
中图法分类号: TP212 文献标识码: A 文章编号: 1000-310X(2022)03-0412-09
DOI: 10.11684/j.issn.1000-310X.2022.03.011

The sensitivity enhancement method of condensing-type SAW gas sensor

based on electrode thickness optimization

ZOU Liangtao 1,2 LIU Jiuling 1 YOU Ran 1,2 LIU Minghua 1 REN Wei 1 HE Shitang 1

(1 Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China)
(2 University of Chinese Academy of Sciences, Beijing 100049, China)

Abstract: This paper improves the sensitivity of condensing gas sensor by optimizing the electrode thickness
of surface acoustic wave (SAW) resonator. Based on the fluid-solid coupling theory, the multi-physics three-
dimensional periodic model with and without liquid film load was established in the finite element commercial
software, and the corresponding coupling mode (COM) parameters were extracted. Using the COM model
and P -matrix cascade technology, the sensor response of liquid film load at different electrode thickness was
calculated, and the variation curve of condensing SAW sensor’s sensitivity with the electrode thickness was
obtained. Experimentally, SAW detectors with six different electrode thicknesses were fabricated. Dimethyl
methyl phosphonatesamples were used to test the performance of the sensor, which verified the correctness of
the theoretical analysis. The results show that the sensitivity of the condensing SAW gas sensor first increases
and then decreases with the increase of electrode thickness, and the optimal normalized electrode thickness is
between 6.4% and 7.6%. The research results are of great significance to further improve the sensitivity of the
sensor.
Keywords: Condensing-type surface acoustic wave gas sensor; The fluid-solid coupling theory; Electrode
thickness optimization; Sensitivity

2020-06-24 收稿; 2022-04-12 定稿
作者简介: 邹亮桃 (1994– ), 女, 湖南衡阳人, 硕士研究生, 研究方向: 声表面波技术。
† 通信作者 E-mail: liujiuling@mail.ioa.ac.cn