Page 135 - 《应用声学》2023年第1期

第 42 卷 第 1 期 Vol. 42, No. 1
2023 年 1 月 Journal of Applied Acoustics January, 2023

⋄ 研究报告 ⋄

气体物理性质对近场超声悬浮特性的影响研究 ∗

李荣和 1,2 桑汉德 1,2 陈 爽 1 赵 夙 2† 王志晖 2 谌江涛 2 罗庸生 2

(1 江西理工大学机电工程学院 赣州 341000)
(2 中国科学院宁波材料技术与工程研究所 宁波 315201)

摘要：在利用近场超声悬浮技术搬运晶圆的过程中，为提高近场超声悬浮力，该文研究了气体物理性质与近场
超声悬浮力之间的关系。利用声辐射压理论与流体力学理论对不同气体介质下的悬浮力进行建模与求解。搭
建了可测量不同气体环境中悬浮力的实验平台。实验发现氩气环境下超声悬浮力平均值相对空气环境下提升
24.8%。结合实验与理论计算分析了气体密度、比热容比、声速与动力黏度对悬浮力的影响，推断气体的比热容
比为影响近场超声悬浮力的主要参数。该方法为晶圆搬运的环境适用性提供了参考价值。
关键词：近场超声悬浮；气体物理性质；悬浮力；比热容比
中图法分类号: O426 文献标识码: A 文章编号: 1000-310X(2023)01-0131-07
DOI: 10.11684/j.issn.1000-310X.2023.01.017

A study on the influence of gas physical properties on near-field acoustic
levitation characteristics

LI Ronghe 1,2 SANG Hande 1,2 CHEN Shuang 1 ZHAO Su 2
WANG Zhihui 2 CHEN Jiangtao 2 LUO Yongsheng 2

(1 School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China)
(2 Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201, China)

Abstract: In the process of using near-field acoustic levitation technology to transport wafers, in order to
improve the near-field acoustic levitation force, this paper studies the relationship between near-field acoustic
levitation force and gas physical properties. The theory of acoustic radiation and fluid dynamics are adopted
to model the levitation force in different gas media. An experimental setup for measuring the levitation force
in different gas environments was developed. The averaged levitation force measured in Helium is 24.8% higher
than that of in air. The influence of gas density, specific heat ratio, sound velocity and viscosity on the levitation
force is analyzed. It is found that the specific heat ratio is the dominant parameter that influences the near-
field acoustic levitation force. This method provides reference value for the environmental applicability of wafer
handling
Keywords: Near-field acoustic levitation; Gas physical properties; Levitation force; Specific heat ratio

2021-11-12 收稿; 2022-02-24 定稿
宁波市 “3315” 创新团队资助项目 (Y80929DL04), 宁波市科技创新 “2025” 重大专项资助项目 (2018B10059)
∗
作者简介: 李荣和 (1997– ), 男, 辽宁铁岭人, 硕士研究生, 研究方向: 近场超声悬浮与功率超声系统设计。
通信作者 E-mail: zhaosu@nimte.ac.cn
†