Page 69 - 《应用声学》2021年第2期

第 40 卷 第 2 期 Vol. 40, No. 2
2021 年 3 月 Journal of Applied Acoustics March, 2021

⋄ 研究报告 ⋄

一种高灵敏度的桥型声表面波应变传感器 ∗

李鹏旭 1,3 李红浪 2† 程利娜 1 卢孜筱 2 罗 为 4 刘久玲 1

(1 中国科学院声学研究所 北京 100190)
(2 国家纳米科学中心 北京 100190)

(3 中国科学院大学 北京 100049)
(4 华中科技大学 武汉 430074)
摘要：为了提高声表面波传感器应变灵敏度，该文提出了一种桥型声表面波应变传感器。首先根据受压弯
曲构件中应变分布特点设计了桥型声表面波应变传感器，并建立有限元模型，结合微扰法分析了桥型结构几
何参数与声表面波应变传感器灵敏度的关系。根据分析结果确定桥型声表面波应变传感器几何结构参数，
并与传统声表面波应变传感器的应变灵敏度进行了对比研究，在此基础上搭建受压弯曲微动平台开展实验
研究，结果表明：在直梁构件受压弯曲应变测量时，Y34 切向的桥型声表面波应变传感器的应变灵敏度为
◦
1692 Hz/µε，传统声表面波传感器应变灵敏度为 1328 Hz/µε，桥型声表面波应变传感器的应变灵敏度较传统
声表面波应变传感器有明显提高。
关键词：声表面波；应变传感器；受压弯曲；桥型结构；应变灵敏度
中图法分类号: TP212.1 文献标识码: A 文章编号: 1000-310X(2021)02-0237-06
DOI: 10.11684/j.issn.1000-310X.2021.02.009

A high sensitivity bridge surface acoustic wave strain senor

LI Pengxu 1,3 LI Honglang 2 CHENG Lina 1 LU Zixiao 2 LUO Wei 4 LIU Jiuling 1

(1 Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China)
(2 The National Center for Nanoscience and Technology, Beijing 100190, China)
(3 University of Chinese Academy of Sciences, Beijing 100049, China)
(4 Huazhong University of Science and Technology, Wuhan 430074, China)

Abstract: In this paper, a bridge surface acoustic wave (SAW) strain sensor is proposed to improve the strain
sensitivity of the SAW strain sensor. First, a bridge SAW strain sensor is designed based on the characteristics
of the strain distribution in the straight beam under bending. The finite element model of the bridge SAW
strain sensor is established, and the relationship between the geometric parameters of the bridge structure
and the sensitivity of the SAW strain sensor is analyzed combined with the perturbation method. Then the
geometric structure parameters are determined according to the analysis results, and the strain sensitivities
of the bridge SAW strain sensor and traditional SAW strain sensor are compared and analyzed in detail.
Eventually, a micro-motion platform is built to carry out the experimental research. The results indicates
that, the strain sensitivity under bending compression of the Y34 cut bridge SAW sensor is 1692 Hz/µε, while
◦
thatof the traditional SAW sensor is 1328 Hz/µε. The sensitivity of the bridge SAW strain sensor is significantly
improved compared to the traditional sensor.
Keywords: Surface acoustic wave; Strain sensor; Bend deformation; Bridge structure; Strain sensitivity

2020-06-06 收稿; 2020-07-15 定稿
国家重点研发计划项目 (2019YFB1405403), “科技创新 2025” 重大专项 (2019B10122)
∗
作者简介: 李鹏旭 (1994– ), 女, 山西晋中人, 硕士研究生, 研究方向: 信号与信息处理。
通信作者 E-mail: lhl@ nanoctr.cn
†