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第 42 卷 第 6 期                                                                       Vol. 42, No. 6
             2023 年 11 月                         Journal of Applied Acoustics                 November, 2023

             ⋄ 研究报告 ⋄



                         微流控芯片流道特征超声C扫描分析                                                      ∗





                                   金士杰 杨雅喃 田 鑫 史思琪 林 莉                                †



                                             (大连理工大学无损检测研究所        大连   116085)

                摘要：微流控芯片流道宽度处于微米尺度，存在特征辨识困难的问题。该文选取两种具有不同流道宽度和布
                局的典型微流控芯片，采用超声 C 扫描技术进行流道特征成像。利用标称中心频率 15 MHz、10 MHz 和 5 MHz
                聚焦探头实施水浸 C 扫描检测，并分析中心频率、焦斑直径、扫描步进等关键参数对流道表征的影响。实验结
                果表明，对于流道宽度 200 µm 的微流控芯片，当探头中心频率不低于 10 MHz、扫描步进不超过 0.1 mm 时，成
                像分辨力和流道表征效果最佳，且流道中心间距测量误差不超过 5%。同时，超声 C 扫描图像可以反映流道宽
                度变化，辨识发生堵塞的微流控芯片。
                关键词：超声 C 扫描；微流控芯片；流道；分辨力
                中图法分类号: TH878; TB553           文献标识码: A          文章编号: 1000-310X(2023)06-1123-06
                DOI: 10.11684/j.issn.1000-310X.2023.06.002




                Analysis of channel characteristics of microfluidic chips by ultrasonic C-scan




                                 JIN Shijie  YANG Yanan     TIAN Xin    SHI Siqi   LIN Li

                               (NDT & E Laboratory, Dalian University of Technology, Dalian 116085, China)

                 Abstract: The widths of the channels in microfluidic chips are at the micron scale, inducing difficulty in feature
                 recognition. In this paper, the ultrasonic C-scan technique is introduced to implement imaging characterization
                 for two typical microfluidic chips with different channel widths and layouts. The C-scan was performed by water
                 immersion using the focusing probes with nominal center frequencies of 15 MHz, 10 MHz and 5 MHz. The effects
                 of key parameters, e.g., center frequency, focal diameter and scanning interval, on channel characterization were
                 analyzed. The experimental results show that the imaging resolution and characterization effects are the best
                 for the microfluidic chip with 200 µm channel widths, when the center frequency of probe is not less than
                 10 MHz and the scanning interval is within 0.1 mm. The measurement error of channel center distance is no
                 more than 5%. Meanwhile, the change of channel width can be determined by ultrasonic C-scan images to
                 identify the blocked microfluidic chip.
                 Keywords: Ultrasonic C-scan; Microfluidic chip; Channel; Resolution







             2022-07-29 收稿; 2022-09-23 定稿
             国家自然科学基金项目 (51905079), 辽宁省 “兴辽英才计划” 项目 (XLYC1902082)
             ∗
             作者简介: 金士杰 (1984– ), 男, 辽宁大连人, 副教授, 博士研究生导师, 研究方向: 材料无损检测与评价。
              通信作者 E-mail: linli@dlut.edu.cn
             †
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