Page 95 - 《应用声学》2021年第2期

第 40 卷 第 2 期 Vol. 40, No. 2
2021 年 3 月 Journal of Applied Acoustics March, 2021

⋄ 研究报告 ⋄

声表面波器件变频快速模拟方法 ∗

宋明鑫 1,2 张碧星 1,2†

(1 中国科学院声学研究所 声场声信息国家重点实验室 北京 100190)
(2 中国科学院大学 北京 100049)
摘要：声表面波器件的级联有限元模拟方法是从整体结构中分离出若干独立的基本单元，通过基本单元边界
矩阵的级联实现有限长器件结构的模拟。在实际设计中，通过优化叉指换能器的指条周期，激发出不同波长的
声表面波，调整声表面波器件的谐振频率，这导致级联有限元模拟方法存在频繁的单元建模与数据传输过程。
为提高模拟效率，该文提出了一种波长 (频率) 变化时的级联有限元快速模拟方法。首先分析了不同波长对应
单元系统矩阵间的关系，引入参考波长及波长变化因子，建立单元系统矩阵与波长之间的简易函数关系。接着
利用参考波长的有限元模型快速计算出不同波长对应的单元系统矩阵，避免了多次单元建模与大量数据传输
过程。最后利用边界矩阵的级联计算器件的频域响应，证明了该方法的有效性。
关键词：声表面波器件；快速模拟方法；级联有限元模拟方法
中图法分类号: TP212.1 文献标识码: A 文章编号: 1000-310X(2021)02-0263-06
DOI: 10.11684/j.issn.1000-310X.2021.02.013

Fast simulation method for frequency change of surface acoustic wave devices

SONG Mingxin 1,2 ZHANG Bixing 1,2

(1 State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China)
(2 University of Chinese Academy of Sciences, Beijing 100049, China)

Abstract: The hierarchical cascade technique for finite element method (HCT-FEM) separates several inde-
pendent basic elements from surface acoustic wave device, and simulates finite length structure by cascading the
boundary matrix of basic blocks. When designing surface acoustic wave (SAW) devices, the resonant frequency
of the SAW device is adjusted by optimizing the period of interdigital transducer (IDT) and exciting SAW with
different wavelength, which leads to frequent unit modeling and data transmission in HCT-FEM. In order to
improve the efficiency of simulation, a HCT-FEM fast simulation method for wavelengths variation is presented.
Firstly, the relationship between system matrix corresponding to different wavelength is analyzed. Introduce
reference wavelength and wavelength change factor to establish a simple functional relationship between the
unit system matrix and wavelength. Using FEM model with the reference wavelength, the unit system matrix
corresponding to different wavelength can be calculated quickly, avoiding multiple unit modeling and large
data transmission. Finally, the frequency domain response of the device is realized by cascading the boundary
matrix, which proves the effectiveness of this method.
Keywords: Surface acoustic wave devices; Fast simulation method; Hierarchical cascade technique

2020-06-22 收稿; 2020-12-06 定稿
国家自然科学基金项目 (11774377)
∗
作者简介: 宋明鑫 (1994– ), 男, 河南周口人, 硕士研究生, 研究方向: 声表面波器件的模拟与设计。
通信作者 E-mail: zhbx@mail.ioa.ac.cn
†