Page 148 - 《应用声学》2020年第2期

第 39 卷 第 2 期 Vol. 39, No. 2
2020 年 3 月 Journal of Applied Acoustics March, 2020

⋄ 研究报告 ⋄

三维微机电系统声发射传感器设计及性能分析

张礼华 † 夏称阳 郭 颖

(江苏科技大学机械学院 镇江 212003)
摘要：声发射技术作为一种动态无损检测手段，主要实现对材料产生的缺陷进行动态监测及损伤位置的预测。
微机电系统声发射传感器在检测材料疲劳裂纹位置和扩展方向上应用广泛，实现其对材料裂纹的 3-D 动态位
移检测，对于无损检测技术的发展具有重要意义。该文提出了一种新型 3-D 微机电系统声发射传感器，首先对
3-D 微机电系统声发射传感器进行了结构设计和性能分析，结构方面主要包括 z 方向响应传感单元和 x、y 方
向响应传感单元设计；其次通过传感器的阻尼、谐振点处灵敏度计算，证明传感器的性能良好；最后采用有限
元软件 ANSYS 对 z 方向响应传感单元做了模态和谐响应分析，x、y 方向响应传感单元做了模态分析和谐响应
分析，仿真结果与理论值吻合较好，验证了结构设计的合理性，对实现材料裂纹的三维动态检测具有一定的参
考意义。
关键词：3-D 传感；微机电系统；声发射；z 方向响应传感；x、y 方向响应传感
中图法分类号: TP212 文献标识码: A 文章编号: 1000-310X(2020)02-0306-10
DOI: 10.11684/j.issn.1000-310X.2020.02.019

Design and performance analysis of three-dimensional MEMS acoustic
emission sensor

ZHANG Lihua XIA Chengyang GUO Ying

(School of Mechanical Engineering, Jiangsu University of Science and Technology, Zhenjiang 212003, China)

Abstract: As a dynamic non-destructive testing method, acoustic emission technology mainly realizes dynamic
monitoring of material defects and prediction of damage location. The acoustic emission sensor of microelectro
mechanical system (MEMS) is mainly used to detect the initial position and extension direction of fatigue
crack, and realize its 3-D dynamic displacement detection of material crack, which is of great significance for
the development of nondestructive testing technology. In this paper, a new type of 3-D MEMS acoustic emission
sensor is proposed. Firstly, the structure design and performance analysis of 3-D MEMS acoustic emission sensor
were carried out. The structure mainly included the z-direction response sensing unit and the x, y direction
response sensing unit design. Secondly, through the damping and sensitivity calculation of the sensor, the
performance of the sensor was demonstrated proved to be good. Finally, the modal harmonic response analysis
of the z-direction response sensing unit was carried out by the finite element software ANSYS, and the x and
y direction response sensing units were analyzed for modal analysis and the response was well. The simulation
results are in good agreement with the theoretical values, verifying the rationality of the structure design. It
has certain reference significance for realizing the 3D dynamic detection of material cracks.
Keywords: 3-D sensing; Microelectro mechanical system; Acoustic emission; z-direction response sensing; x
and y direction response sensing

2019-05-16 收稿; 2019-11-28 定稿
作者简介: 张礼华 (1974– ), 男, 江苏镇江人, 博士, 教授, 研究生导师, 研究方向: 智能驱动与传感技术。
† 通信作者 E-mail: zhanglihua200@126.com